US Patent 8216422 Substrate support bushing
Patent 8216422 was granted and assigned to Applied Materials on July, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 27, 2005
0
Date of Patent
July 10, 2012
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Patent Application Number
11044245
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Patent Citations Received
Patent Inventor Names
Shinichi Kurita
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Toshio Kiyotake
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Suhail Anwar
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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