Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Brian Lawrence Gilmore0
Lance G. Hellwig0
Date of Patent
July 17, 2012
Patent Application Number
13232684
Date Filed
September 14, 2011
Patent Citations Received
0
Patent Primary Examiner
Patent abstract
A wafer boat for a semiconductor wafer includes vertical rods, fingers supported by the vertical rods, and plates supported by the fingers. The plate has a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contamination of the wafer.
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