Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 17, 2012
Patent Application Number
12117392
Date Filed
May 8, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Disclosed is a turbo-molecular pump, which comprises a rotor including a first cylindrical body formed with a part of a plurality of rotating blades arranged in multistage, a second cylindrical body integrally connected to an outer peripheral region of a downstream end of the first cylindrical body and formed with the remaining rotating blades, and a stress-releasing protrusion extending from the downstream end of the first cylindrical body along a direction of a rotation axis of the rotor. The turbo-molecular pump of the present invention can reduce a stress in the downstream end of the first cylindrical body.
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