Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 14, 2012
Patent Application Number
12276115
Date Filed
November 21, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
A lithographic apparatus may be provided with an acoustic resonator to dampen an acoustic vibration in the lithographic apparatus. The acoustic resonator may include a Helmholtz resonator. The helmholz resonator may be provided with an active element to provide active damping and/or altering a spring characteristic of the mass spring assembly formed by the resonator. The resonator may be provided at a slit in a shield between the patterning device stage and the projection system to suppress transfer of acoustical vibrations, caused by e.g. a movement of the patterning device stage, to the projection system.
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