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US Patent 8272825 Load lock fast pump vent

Patent 8272825 was granted and assigned to Brooks Automation on September, 2012 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Brooks Automation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

82728250

Patent Inventor Names

Christopher Hofmeister0

Joseph Hallisey0

Martin R. Elliot0

William Fosnight0

Alexander Krupyshev0

Craig J. Carbone0

Ho Yin Owen Fong0

Jeffrey C. Blahnik0

...

Date of Patent

September 25, 2012

Patent Application Number

121233650

Date Filed

May 19, 2008

Patent Citations Received

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US Patent 12094715 Abatement and strip process chamber in a load lock configuration

Patent Primary Examiner

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James Keenan

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