US Patent 8274017 Multifunctional heater/chiller pedestal for wide range wafer temperature control

Patent 8274017 was granted and assigned to Applied Materials on September, 2012 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

82740170

Patent Inventor Names

Thomas Nowak0

Tuan Anh Nguyen0

Dale R. Du Bois0

Jianhua Zhou0

Juan Carlos Rocha-Alvarez0

Lipyeow Yap0

Sanjeev Baluja0

Date of Patent

September 25, 2012

Patent Application Number

126418190

Date Filed

December 18, 2009

Patent Citations Received

‌

US Patent 12000048 Pedestal for substrate processing chambers

Patent Primary Examiner

‌

David S. Blum

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