US Patent 8279577 Substrate support having fluid channel
Patent 8279577 was granted and assigned to Applied Materials on October, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 2, 2010
0
Date of Patent
October 2, 2012
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Patent Application Number
12849012
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Patent Citations Received
Patent Inventor Names
Wing Lau Cheng
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Yan Ye
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Andrew Nguyen
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Brian C. Lue
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Daniel J. Hoffman
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Hiroji Hanawa
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Kartik Ramaswamy
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Kwok Manus Wong
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Semyon Kats
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Tetsuya Ishikawa
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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