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US Patent 8289040 Test wafer unit and test system

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

October 16, 2012

Patent Application Number

12947721

Date Filed

November 16, 2010

Patent Citations Received

US Patent 12013432 Thermal control wafer with integrated heating-sensing elements

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US Patent 12061227 Integrated heater and temperature measurement

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US Patent 12085609 Thermal control wafer with integrated heating-sensing elements

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US Patent 11852542 Methods for measuring temperature of wafer chuck and calibrating temperature and system for measuring temperature

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US Patent 12000885 Multiplexed thermal control wafer and coldplate

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Patent Primary Examiner

Arleen M Vazquez

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