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US Patent 8293658 Reactive site deactivation against vapor deposition

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

82936580

Patent Inventor Names

Shawn Miller0

Eric Shero0

Mohith Verghese0

Anthony Muscat0

Date of Patent

October 23, 2012

Patent Application Number

127070650

Date Filed

February 17, 2010

Patent Citations Received

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US Patent 11920239 Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma

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US Patent 11749523 Methods for preparing self-assembled monolayers

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US Patent 11761079 Oxidation resistant protective layer in chamber conditioning

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US Patent 11804373 Selective layer formation using deposition and removing

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US Patent 11830732 Selective passivation and selective deposition

Patent Primary Examiner

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Kyoung Lee

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