US Patent 8314560 Plasma processing apparatus
Patent 8314560 was granted and assigned to SAMCO on November, 2012 by the United States Patent and Trademark Office.
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Patent Citations Received
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Patent Inventor Names
Hirohiko Nakano0
Shinji Nakagami0
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US Patent 08314560 Plasma processing apparatus US Patent 8314560 Plasma processing apparatus
Infobox
Patent Number
083145600
Patent Number
83145600
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
083145600
Date of Patent
November 20, 2012
0Patent Application Number
124473840
Date Filed
November 21, 2007
0Patent Primary Examiner
Edits on 15 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 08314560 Plasma processing apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08314560
Date of patent
November 20, 2012
Patent application number
12447384
Date Filed
November 21, 2007
Patent primary examiner
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