US Patent 8336488 Multi-station plasma reactor with multiple plasma regions

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8336488

Patent Inventor Names

Yijun Liu0

Aihua Chen0

Gerald Yin0

Henry Ho0

Jinyuan Chen0

Lee Luo0

Tuqiang Ni0

Date of Patent

December 25, 2012

Patent Application Number

11961718

Date Filed

December 20, 2007

Patent Citations Received

‌

US Patent 12074042 High-density substrate processing systems and methods

‌

US Patent 11948817 Robot for simultaneous substrate transfer

Patent Primary Examiner

‌

Sylvia R. MacArthur

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