US Patent 8336490 Plasma processing apparatus

Patent 8336490 was granted and assigned to Tokyo Electron on December, 2012 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

83364900

Patent Inventor Names

Hiroyuki Matsuura0

Kohei Fukushima0

Toshiki Takahashi0

Date of Patent

December 25, 2012

Patent Application Number

133391490

Date Filed

December 28, 2011

Patent Citations Received

‌

US Patent 12131889 Plasma generating apparatus, plasma processing apparatus, and plasma processing method

Patent Primary Examiner

‌

Rakesh Dhingra

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