Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert Blanchard0
Douglas Loy0
R. Steve Rednour0
Date of Patent
January 8, 2013
0Patent Application Number
129218710
Date Filed
March 25, 2009
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides a debonding apparatus, a system comprising such apparatus, and methods for using such apparatus or system for the removal of flexible substrates (14) post-processing without damage to fabricated devices.
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