Patent attributes
A fluid sensor for detecting fluid in a chamber, has a MEMS sensing element of conductive material with a resistance that is a function of temperature, and electrical contacts for connection to an electrical power source for heating the sensing element with an electrical signal, so that control circuitry can measure the current passing through the sensing element during heating of the sensing element; and determine the temperature of the sensing element from the known applied voltage, the measured current and the known relationship between the current, resistance and temperature. As the temperature of the element will be greater if it is in the presence of gas rather than liquid, the sensor determines if there is liquid or gas in the chamber. This is particularly useful to detect if the chambers of an inkjet printhead are primed with ink.