US Patent 8359927 Molded differential PRT pressure sensor
Patent 8359927 was granted and assigned to Freescale Semiconductor on January, 2013 by the United States Patent and Trademark Office.
All edits
A method and apparatus are described for fabricating an exposed differential pressure sensor (30) which protects interior electrical components (37) formed on a topside surface of a differential pressure sensor transducer die (31) from corrosive particles using a molding compound (39), but which vents both sides of a piezoresistive transducer sensor diaphragm (33) through a first vent hole (42) formed in an exposed die flag (36) and a second vent hole (38) formed in an exposed cap structure (33), enabling the sensor diaphragm (33) to sense differential pressure variations directly or indirectly through a protective gel.
US Patent 08359927 Molded differential PRT pressure sensor US Patent 8359927 Molded differential PRT pressure sensor
US Patent 08359927 Molded differential PRT pressure sensor
Find more entities like US Patent 8359927 Molded differential PRT pressure sensor
