US Patent 8388412 Retaining ring with shaped profile
Patent 8388412 was granted and assigned to Applied Materials on March, 2013 by the United States Patent and Trademark Office.
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Patent abstract
Retaining rings with curved surfaces are described. The curved surfaces prevent damage to a fixed abrasive polishing pad when the retaining ring is used in a polishing process. The curved surfaces are on the bottom surface of the ring, such as along the outer diameter and/or along the sidewalls of channels formed in the bottom of the ring.
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US Patent 08388412 Retaining ring with shaped profile US Patent 8388412 Retaining ring with shaped profile
Infobox
Patent Number
0838841200
Patent Number
838841200
Edits on 30 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
083884120
Date of Patent
March 5, 2013
0Patent Application Number
132694880
Date Filed
October 7, 2011
0Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
083884120
Date of Patent
March 5, 2013
0Patent Application Number
132694880
Date Filed
October 7, 2011
0Patent Primary Examiner
Edits on 16 Dec, 2021
Golden AI
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US Patent 08388412 Retaining ring with shaped profile
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08388412
Date of patent
March 5, 2013
Patent application number
13269488
Date Filed
October 7, 2011
Patent primary examiner
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