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US Patent 8394455 Method for forming diamond-like carbon film

Patent 8394455 was granted and assigned to Tokyo Denki University on March, 2013 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
Tokyo Denki University
Tokyo Denki University
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
83944550
Patent Inventor Names
Kazuhide Ozeki0
Kenji Hirakuri0
Date of Patent
March 12, 2013
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Patent Application Number
121751280
Date Filed
July 17, 2008
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Patent Primary Examiner
‌
Kelly M Gambetta
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Patent abstract

Provided is a method for forming a diamond-like carbon (DLC) film capable of enhancing the adhesion strength of a diamond-like carbon (DLC) film by simple steps. A surface of a substrate 11 made of polytetrafluoroethylene (PTFE) is modified by plasma radiation, and a diamond-like carbon film 12 is formed on the modified PTFE substrate 11 surface by chemical vapor deposition.

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