Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 12, 2013
Patent Application Number
12597308
Date Filed
May 8, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention relates to a configurable trench multi-capacitor device comprising a trench in a semiconductor substrate. The trench has a lateral extension exceeding 10 micrometer and a trench filling includes a number of at least four electrically conductive capacitor-electrode layers. A switching unit is provided that comprises a plurality of switching elements electrically interconnected between different capacitor-electrode layers of the trench filling. A control unit is connected with the switching unit and configured to generate and provide to the switching unit respective control signals for forming a respective one of a plurality of multi-capacitor configurations using the capacitor-electrode layers of the trench filling.
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