US Patent 8397668 Plasma processing apparatus
Patent 8397668 was granted and assigned to Hitachi on March, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 5, 2009
Date of Patent
March 19, 2013
Patent Application Number
12398226
Patent Citations Received
Patent Inventor Names
Masaru Izawa
0
Hiroyuki Kobayashi
0
Kenetsu Yokogawa
0
Kenji Maeda
0
Tadamitsu Kanekiyo
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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