US Patent 8398815 Plasma processing apparatus
Patent 8398815 was granted and assigned to Tokyo Electron on March, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 14, 2008
0
Date of Patent
March 19, 2013
0
Patent Application Number
12271461
0
Patent Inventor Names
Naohiko Okunishi
0
Yohei Yamazawa
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 8398815 Plasma processing apparatus
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
