US Patent 8441639 Metrology systems and methods

Patent 8441639 was granted and assigned to KLA-Tencor on May, 2013 by the United States Patent and Trademark Office.

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Date of Patent

May 14, 2013

Patent Application Number

12872988

Date Filed

August 31, 2010

Patent Citations Received

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Patent abstract

Various metrology systems and methods are provided.

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