Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 21, 2013
Patent Application Number
13064973
Date Filed
April 28, 2011
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The invention is directed toward a chemical mechanical polishing/planarizing (CMP) brush with an embedded mandrel. PVA foam injected into the substantially hollow mandrel expands through apertures in the mandrel to fill a mold in the desired shape of the brush with the foam in the mandrel being integral with the outer foam covering the brush.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
