Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hanns-Joachim Knaus0
Date of Patent
June 18, 2013
0Patent Application Number
121778090
Date Filed
July 22, 2008
0Patent Citations Received
0
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Patent Primary Examiner
Patent abstract
For determining a wave running time between a RF source in a plasma power supply device and a load connected to the plasma power supply device, an RF pulse is transmitted forwards from the RF source to the load. The pulses are reflected by the load and transmitted backwards to the power source. A return time measured on arrival of the pulse(s) at the inverter is used to determine a wave running time.
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