Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 8468473 Method for high volume e-beam lithography

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
June 8, 2012
Date of Patent
June 18, 2013
Patent Application Number
13492408
Patent Citations Received
‌
US Patent 12009202 Using a self-assembly layer to facilitate selective formation of an etching stop layer
0
‌
US Patent 11664237 Semiconductor device having improved overlay shift tolerance
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8468473
Patent Primary Examiner
‌
Vuthe Siek

Find more entities like US Patent 8468473 Method for high volume e-beam lithography

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo