Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tamaki Yuasa0
Shinya Nishimoto0
Date of Patent
July 16, 2013
0Patent Application Number
120904930
Date Filed
October 18, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A structure of an improved processing vessel for a processing apparatus, which processes a target object using a processing gas, is disclosed. The target object, such as a semiconductor wafer, is heated within a metal cylindrical shaped processing vessel. The processing vessel includes a plurality of block bodies mutually connected by being stacked in the vertical direction. Heat insulating vacuum layers are arranged between the adjacent block bodies. Thus, heat transfer between block bodies is suppressed, so that temperature of each block body can be separately controlled, thereby improving energy efficiency.
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