Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 16, 2013
Patent Application Number
12919488
Date Filed
March 1, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
A test structure is presented test structure on a substrate for monitoring a LER and/or LWR effect, said test structure comprising an array of features manufactured with amplified LER and/or LWR effect.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
