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US Patent 8500388 Semiconductor wafer handling and transport

Patent 8500388 was granted and assigned to Brooks Automation on August, 2013 by the United States Patent and Trademark Office.

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US Patent 12129791 Baffled thermoclines in thermodynamic cycle systems
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US Patent 12123347 Pumped heat energy storage system with load following
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US Patent 12123327 Pumped heat energy storage system with modular turbomachinery
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US Patent 12080571 Substrate processing module and method of moving a workpiece
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US Patent 11982228 Pumped heat energy storage system with steam cycle
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US Patent 11927130 Pump control of closed cycle power generation system
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US Patent 11885244 Pumped heat energy storage system with electric heating integration
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US Patent 11852043 Pumped heat electric storage system with recirculation
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US Patent 11840932 Pumped heat energy storage system with generation cycle thermal integration
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US Patent 11761336 Adiabatic salt energy storage
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US Patent 11754319 Pumped thermal storage cycles with turbomachine speed control
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US Patent 11673275 Through-beam auto teaching
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US Patent 11655759 Modular thermal storage
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US Patent 08500388 Semiconductor wafer handling and transport US Patent 8500388 Semiconductor wafer handling and transport

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Patent Number
085003880
Patent Number
85003880

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