US Patent 8509937 Processing apparatus and operating method therefor
Patent 8509937 was granted and assigned to Tokyo Electron on August, 2013 by the United States Patent and Trademark Office.
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US Patent 08509937 Processing apparatus and operating method therefor US Patent 8509937 Processing apparatus and operating method therefor
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Patent Number
085099370
Patent Number
85099370
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
085099370
Date of Patent
August 13, 2013
0Patent Application Number
126831120
Date Filed
January 6, 2010
0Patent Primary Examiner
Edits on 17 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 08509937 Processing apparatus and operating method therefor
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08509937
Date of patent
August 13, 2013
Patent application number
12683112
Date Filed
January 6, 2010
Patent primary examiner
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