US Patent 8509938 Substrate apparatus calibration and synchronization procedure

Patent 8509938 was granted and assigned to Brooks Automation on August, 2013 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Brooks Automation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

85099380

Date of Patent

August 13, 2013

Patent Application Number

133669680

Date Filed

February 6, 2012

Patent Citations Received

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US Patent 11667166 All-terrain vehicle

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US Patent 12115683 Calibration of an electronics processing system

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US Patent 11766782 Calibration of an electronics processing system

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US Patent 11759954 Calibration of an electronics processing system

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