US Patent 8518827 Spectrum based endpointing for chemical mechanical polishing
Patent 8518827 was granted and assigned to Applied Materials on August, 2013 by the United States Patent and Trademark Office.
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US Patent 08518827 Spectrum based endpointing for chemical mechanical polishing US Patent 8518827 Spectrum based endpointing for chemical mechanical polishing
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Patent Number
08518827
Patent Number
8518827
Edits on 17 Dec, 2021
Golden AI
Edits made to:
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US Patent 08518827 Spectrum based endpointing for chemical mechanical polishing
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Is a
Current assignee
Patent jurisdiction
Patent number
08518827
Date of patent
August 27, 2013
Patent application number
12843782
Date Filed
July 26, 2010
Patent primary examiner
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