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US Patent 8542076 Impedance matching
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Edits on 23 Oct, 2024
"update inverses"
Golden AI
edited on 23 Oct, 2024
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Patent Citations Received
US Patent 12125673 Pulsed voltage source for plasma processing applications
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Edits on 9 Oct, 2024
"update inverses"
Golden AI
edited on 9 Oct, 2024
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Patent Citations Received
US Patent 12111341 In-situ electric field detection method and apparatus
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Edits on 3 Oct, 2024
"update inverses"
Golden AI
edited on 3 Oct, 2024
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Patent Citations Received
US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
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Edits on 7 Aug, 2024
"update inverses"
Golden AI
edited on 7 Aug, 2024
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Patent Citations Received
0
Edits on 15 May, 2024
"update inverses"
Golden AI
edited on 15 May, 2024
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Patent Citations Received
US Patent 11984306 Plasma chamber and chamber component cleaning methods
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Edits on 1 May, 2024
"update inverses"
Golden AI
edited on 1 May, 2024
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Patent Citations Received
US Patent 11972924 Pulsed voltage source for plasma processing applications
0
"update inverses"
Golden AI
edited on 1 May, 2024
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Patent Citations Received
US Patent 11972928 Method and system for plasma processing arc suppression
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Edits on 24 Apr, 2024
"update inverses"
Golden AI
edited on 24 Apr, 2024
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Patent Citations Received
US Patent 11967483 Plasma excitation with ion energy control
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Edits on 4 Apr, 2024
"update inverses"
Golden AI
edited on 4 Apr, 2024
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Patent Citations Received
US Patent 11948780 Automatic electrostatic chuck bias compensation during plasma processing
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Edits on 1 Feb, 2024
"update inverses"
Golden AI
edited on 1 Feb, 2024
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Patent Citations Received
US Patent 11887813 Pulsed voltage source for plasma processing
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Edits on 18 Oct, 2023
"update inverses"
Golden AI
edited on 18 Oct, 2023
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Patent Citations Received
US Patent 11791138 Automatic electrostatic chuck bias compensation during plasma processing
Edits on 5 Oct, 2023
"update inverses"
Golden AI
edited on 5 Oct, 2023
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Patent Citations Received
US Patent 11776789 Plasma processing assembly using pulsed-voltage and radio-frequency power
"update inverses"
Golden AI
edited on 5 Oct, 2023
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Patent Citations Received
US Patent 11776788 Pulsed voltage boost for substrate processing
Edits on 12 Jul, 2023
"update inverses"
Golden AI
edited on 12 Jul, 2023
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Patent Citations Received
US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform
0
Edits on 5 Jul, 2023
"update inverses"
Golden AI
edited on 5 Jul, 2023
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Patent Citations Received
US Patent 11694876 Apparatus and method for delivering a plurality of waveform signals during plasma processing
0
Edits on 25 May, 2023
"Remove leading 0 from patent number"
Golden AI
edited on 25 May, 2023
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US Patent 08542076 Impedance matching
US Patent 8542076 Impedance matching
Infobox
Patent Number
08542076
0
Patent Number
8542076
0
Edits on 23 Sep, 2022
"Entity importer update"
Golden AI
edited on 23 Sep, 2022
Infobox
Is a
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
0
Patent Number
08542076
0
Date of Patent
September 24, 2013
0
Patent Application Number
12718136
0
Date Filed
March 5, 2010
0
Patent Primary Examiner
Minh D A
0
Edits on 18 Dec, 2021
"Created via: Entity Importer"
Golden AI
created this topic on 18 Dec, 2021
Edits made to:
Infobox
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+7
properties)
US Patent 08542076 Impedance matching
Infobox
Is a
Patent
Patent jurisdiction
United States Patent and Trademark Office
Patent number
08542076
Date of patent
September 24, 2013
Patent application number
12718136
Date Filed
March 5, 2010
Patent primary examiner
Minh D A
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