US Patent 8617411 Methods and apparatus for atomic layer etching
Patent 8617411 was granted and assigned to Lam Research on December, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 20, 2011
Date of Patent
December 31, 2013
Patent Application Number
13187437
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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