Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dershen Wan0
Eric Mason0
Robert Jay Rafac0
Rostislav Rokitski0
Date of Patent
January 7, 2014
Patent Application Number
13830905
Date Filed
March 14, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A deep ultraviolet light source includes a master oscillator producing a seed light beam; a regenerative ring amplifier receiving the seed light beam from the master oscillator and outputting an output light beam, the regenerative ring amplifier including a set of optical components that define a plane of a closed ring; and a divergence control device within the master oscillator or between the master oscillator and the regenerative ring amplifier and configured to reduce a divergence of the output light beam along a normal direction, the normal direction being perpendicular to the plane of the ring.
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