US Patent 8656584 Method of fabricating an electromechanical component using graphene

Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of:a) formation, inside a layer of at least one given material resting on a support, of at least one bar,b) formation around the bar of at least one first graphene sheet, and of a least one second graphene sheet, separated from the first sheet and mobile with respect to the first sheet.