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US Patent 8658442 Method for producing an electronic component and electronic component

Patent 8658442 was granted and assigned to Osram Opto Semiconductors GmbH on February, 2014 by the United States Patent and Trademark Office.

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Patent abstract

A method for producing an electronic component comprising barrier layers for the encapsulation of the component comprises, in particular, the following steps: providing a substrate (1) with at least one functional layer (22), applying at least one first barrier layer (3) on the functional layer (22) by means of plasma-enhanced atomic layer deposition (PEALD), and applying at least one second barrier layer (4) on the functional layer (22) by means of plasma-enhanced chemical vapor deposition (PECVD).

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