Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jyrki Kaitila0
John D. Larson, III0
Stefan Bader0
Date of Patent
March 18, 2014
0Patent Application Number
134284740
Date Filed
March 23, 2012
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
In accordance with a representative embodiment, a method, comprises: providing a substrate; forming a first piezoelectric layer having a compression-negative (CN) polarity over the substrate; and forming a second piezoelectric layer having a compression-positive (CP) over the substrate and adjacent to the first piezoelectric layer.
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