Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Berman0
Alexander Krohmal0
Gennady Openganden0
Matthew Wormington0
Date of Patent
April 1, 2014
Patent Application Number
13180568
Date Filed
July 12, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.
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