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US Patent 8692204 Apparatus and methods for electron beam detection

Patent 8692204 was granted and assigned to KLA-Tencor on April, 2014 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
KLA-Tencor
KLA-Tencor
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Date Filed
April 23, 2012
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Date of Patent
April 8, 2014
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Patent Application Number
13453902
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Patent Citations Received
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US Patent 12080050 Machine learning using a global texture characteristic for semiconductor-based applications
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US Patent 11748872 Setting up inspection of a specimen
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US Patent 11749495 Bandpass charged particle energy filtering detector for charged particle tools
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US Patent 11776108 Deep learning based defect detection
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US Patent 11887296 Setting up care areas for inspection of a specimen
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US Patent 11961219 Generative adversarial networks (GANs) for simulating specimen images
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US Patent 11983865 Deep generative model-based alignment for semiconductor applications
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US Patent 11748871 Alignment of a specimen for inspection and other processes
Patent Inventor Names
William M. Tong
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Shinichi Kojima
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Christopher F. Bevis
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Joseph Maurino
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
8692204
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Patent Primary Examiner
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David Porta
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