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US Patent 8702479 Polishing pad with multi-modal distribution of pore diameters

Patent 8702479 was granted and assigned to Nexplanar Corporation on April, 2014 by the United States Patent and Trademark Office.

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Patent abstract

Polishing pads with multi-modal distributions of pore diameters are described. Methods of fabricating polishing pads with multi-modal distributions of pore diameters are also described.

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