Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Antoine Gaston Marie Kiers0
Henricus Petrus Maria Pellemans0
Hugo Augustinus Joseph Cramer0
Date of Patent
April 22, 2014
Patent Application Number
12690221
Date Filed
January 20, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
For angular resolved spectrometry a radiation beam is used having an illumination profile having four quadrants is used. The first and third quadrants are illuminated whereas the second and fourth quadrants aren't illuminated. The resulting pupil plane is thus also divided into four quadrants with only the zeroth order diffraction pattern appearing in the first and third quadrants and only the first order diffraction pattern appearing in the second and third quadrants.
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