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US Patent 8755044 Large particle detection for multi-spot surface scanning inspection systems

Patent 8755044 was granted and assigned to KLA-Tencor on June, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

KLA-Tencor

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

87550440

Patent Inventor Names

Jiayao Zhang0

Charles Amsden0

Christian Wolters0

Juergen Reich0

Date of Patent

June 17, 2014

Patent Application Number

135657020

Date Filed

August 2, 2012

Patent Citations Received

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US Patent 11946863 Second Harmonic Generation (SHG) optical inspection system designs

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US Patent 11988611 Systems for parsing material properties from within SHG signals

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US Patent 11703460 Methods and systems for optical surface defect material characterization

Patent Primary Examiner

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Hoa Pham

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