US Patent 8755165 Fault tolerant ion source power system

Patent 8755165 was granted and assigned to Veeco on June, 2014 by the United States Patent and Trademark Office.

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Curtis Charles Camus0

Dennis John Hansen0

James David Deakins0

Date of Patent

June 17, 2014

Patent Application Number

12906756

Date Filed

October 18, 2010

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