US Patent 8758086 Friction sensor for polishing system

Patent 8758086 was granted and assigned to Applied Materials on June, 2014 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8758086

Patent Inventor Names

Dominic J. Benvegnu0

Nils Johansson0

Manoocher Birang0

Boguslaw A. Swedek0

Gabriel Lorimer Miller0

Date of Patent

June 24, 2014

Patent Application Number

13714202

Date Filed

December 13, 2012

Patent Citations Received

‌

US Patent 11660722 Polishing system with capacitive shear sensor

Patent Primary Examiner

‌

Lee D. Wilson

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