US Patent 8765615 Quartz-based MEMS resonators and methods of fabricating same

Patent 8765615 was granted and assigned to Hrl Laboratories, Llc on July, 2014 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Hrl Laboratories, Llc

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8765615

Date of Patent

July 1, 2014

Patent Application Number

12816292

Date Filed

June 15, 2010

Patent Citations Received

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US Patent 11703330 Fused quartz dual shell resonator and method of fabrication

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US Patent 11988727 Magnetostrictive MEMS magnetic gradiometer

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US Patent 11863194 Phononic comb enhanced atomic clock

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US Patent 11747512 Phononic comb enhanced MEMS gravity gradiometers

Patent Primary Examiner

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Shamim Ahmed

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