US Patent 8767178 Immersion lithography system using direction-controlling fluid inlets
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US Patent 08767178 Immersion lithography system using direction-controlling fluid inlets US Patent 8767178 Immersion lithography system using direction-controlling fluid inlets
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Patent Number
0876717800
Patent Number
876717800
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Patent Jurisdiction
Patent Number
087671780
Date of Patent
July 1, 2014
0Patent Application Number
134828790
Date Filed
May 29, 2012
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
087671780
Date of Patent
July 1, 2014
0Patent Application Number
134828790
Date Filed
May 29, 2012
0Official Website
Patent Primary Examiner
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US Patent 08767178 Immersion lithography system using direction-controlling fluid inlets
Infobox
Is a
Patent jurisdiction
Patent number
08767178
Date of patent
July 1, 2014
Patent application number
13482879
Date Filed
May 29, 2012
Patent primary examiner
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