US Patent 8791392 Methods of fault detection for multiplexed heater array

Patent 8791392 was granted and assigned to Lam Research on July, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8791392

Patent Inventor Names

Harmeet Singh0

Date of Patent

July 29, 2014

Patent Application Number

12910347

Date Filed

October 22, 2010

Patent Citations Received

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US Patent 11837480 Temperature controlling apparatus, temperature controlling method, and placing table

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US Patent 12074049 Permanent secondary erosion containment for electrostatic chuck bonds

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US Patent 11984296 Substrate support with improved process uniformity

Patent Primary Examiner

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Sang Y. Paik

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