US Patent 8816281 Ion energy analyzer and methods of manufacturing the same
Patent 8816281 was granted and assigned to Tokyo Electron on August, 2014 by the United States Patent and Trademark Office.
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US Patent 08816281 Ion energy analyzer and methods of manufacturing the same US Patent 8816281 Ion energy analyzer and methods of manufacturing the same
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Patent Number
0881628100
Patent Number
881628100
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
088162810
Date of Patent
August 26, 2014
0Patent Application Number
134330880
Date Filed
March 28, 2012
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
088162810
Date of Patent
August 26, 2014
0Patent Application Number
134330880
Date Filed
March 28, 2012
0Official Website
Patent Primary Examiner
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Website URL
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US Patent 08816281 Ion energy analyzer and methods of manufacturing the same
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08816281
Date of patent
August 26, 2014
Patent application number
13433088
Date Filed
March 28, 2012
Patent primary examiner
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