US Patent 8826855 C-shaped confinement ring for a plasma processing chamber
Patent 8826855 was granted and assigned to Lam Research on September, 2014 by the United States Patent and Trademark Office.
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Patent Citations Received
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Patent Inventor Names
Alexei Marakhtanov0
Michael C. Kellogg0
Rajinder Dhindsa0
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US Patent 08826855 C-shaped confinement ring for a plasma processing chamber US Patent 8826855 C-shaped confinement ring for a plasma processing chamber
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Patent Number
088268550
Patent Number
88268550
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Official Website
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
088268550
Date of Patent
September 9, 2014
0Patent Application Number
128280650
Date Filed
June 30, 2010
0Official Website
Patent Primary Examiner
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US Patent 08826855 C-shaped confinement ring for a plasma processing chamber
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08826855
Date of patent
September 9, 2014
Patent application number
12828065
Date Filed
June 30, 2010
Patent primary examiner
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