US Patent 8828182 Process chamber gas flow improvements

Patent 8828182 was granted and assigned to Applied Materials on September, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88281820

Patent Inventor Names

Brian T. West0

Stanley Detmar0

Ronald Vern Schauer0

Date of Patent

September 9, 2014

Patent Application Number

130240940

Date Filed

February 9, 2011

Patent Citations Received

‌

US Patent 11854769 Adjustable fastening device for plasma gas injectors

Patent Primary Examiner

‌

Dinh Q. Nguyen

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