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US Patent 8851817 Universal modular wafer transport system

Patent 8851817 was granted and assigned to Brooks Automation on October, 2014 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Brooks Automation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88518170

Patent Inventor Names

Jerry A. Speasl0

Anthony C. Bonora0

Michael Krolak0

Richard H. Gould0

Roger G. Hine0

Date of Patent

October 7, 2014

Patent Application Number

129431980

Date Filed

November 10, 2010

Patent Citations Received

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US Patent 11894251 Transport system

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US Patent 11784074 Substrate transfer systems and methods of use thereof

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US Patent 11964831 Magnetically guided material handling robot

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US Patent 12106991 Substrate transfer systems and methods of use thereof

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US Patent 11961758 Apparatus for processing substrate and method of transferring substrate

Patent Primary Examiner

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Saul Rodriguez

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